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23 Oct 2006, 8:32 pm
US Patent 6433411 - Agere Systems Guardian Corp. and Lucent Technologies Inc. , priority May 22, 2000Claim 1 - "A micro-electronic machined mechanical (MEMS) assembly comprising a silicon chamber having a silicon base and silicon sidewalls, and a MEMS device mounted on the silicon base within the silicon chamber. [read post]
9 Oct 2006, 12:34 pm
The listed patents are based on the claim breadth and are not necessarily indicative of technical importance or economic value.1. [read post]
