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23 Oct 2006, 8:32 pm
US Patent 6445006 - Advanced Technology Materials, Inc., priority July 27, 1999 (possibly earlier due to CIP)Claim 1 - " A microelectronic or microelectromechanical device, comprising: a substrate, wherein the substrate includes an oxide layer and an etch stop layer for the oxide layer; and a fiber formed of a carbon-containing material. [read post]
